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Nanostructuring of materials can yield novel and improved materials properties and enhanced materials performance. The ability to image and characterise these nanoscale features quickly and in high-resolution is therefore essential to drive technological progress.
This can be achieved by pushing scanning electron microscopy (SEM) to its limits, working in the nanoscale range of 1 – 100 nm, combined with energy dispersive X-ray spectroscopy (EDS) to chemically characterise features at scales unachievable using conventional EDS analysis.
In this webcast, the speakers will identify the challenges of high-resolution nanoscale SEM based characterisation, providing information on optimising microscope conditions to maximise results. They will demonstrate the strengths of combining high-resolution SEM with windowless EDS analysis to enable nanometre chemical analysis of key material features. Application examples will be shown from various samples, including steels/metals and semiconductors.